Tip-induced anodization of titanium surfaces by scanning tunneling microscopy: A humidity effect on nanolithography

Hiroyuki Sugimura*, Tatsuya Uchida, Noboru Kitamura, Hiroshi Masuhara

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

112 Scopus citations

Abstract

A scanning tunneling microscope was employed for tip-induced anodization of titanium (Ti) surfaces. Spatial resolution of fabricated patterns was remarkably affected by the tip shape and humidity in the atmosphere. The amount of adsorbed water on the Ti surface determined by humidity has a key role in controlling the resolution, and the resolution becomes worse with increasing humidity. Under the optimized conditions, tip-induced anodization of Ti was successfully achieved with a spatial resolution of 30 nm.

Original languageEnglish
Pages (from-to)1288-1290
Number of pages3
JournalApplied Physics Letters
Volume63
Issue number9
DOIs
StatePublished - 1 Dec 1993

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