Ti/Al/Ti/Ni/Au ohmic contacts on AlGaN/GaN high electron mobility transistors with improved surface morphology and low contact resistance

Yu Sheng Chiu, Tai Ming Lin, Hong Quan Nguyen, Yu Chen Weng, Chi Lang Nguyen, Yueh Chin Lin, Hung Wei Yu, Edward Yi Chang*, Ching Ting Lee

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

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