Three electrodes touch-mode capacitive pressure sensor

Kow-Ming Chang*, G. J. Hwang, Y. L. Hsien

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A three-electrode capacitive pressure sensor for touch-mode operation with sensitivity of 0.030 pF/kPa (or 10.4 mV/kPa using CP-10 C/V converter circuit) in the pressure range of 170-280 kPa is presented with theoretical explanation of experimental results. A special ring structure is designed to integrate a sensing capacitor and a reference capacitor into the same cavity to partially cancel out the temperature effect. A third electrode is included to eliminate two-level connections without reducing its pressure sensitivity. The sensor offers the advantages of simple fabrication processes, planar connections, as well as high sensitivity, near-linear output, and large over-range pressure.

Original languageEnglish
Pages (from-to)93-99
Number of pages7
JournalMicrosystem Technologies
Volume5
Issue number2
DOIs
StatePublished - 1 Jan 1998

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