Three-axis MEMS DC magnetic sensor using magnetic force interaction with the piezoelectric effect

Po Chen Yeh, Hao Duan, Tien-Kan Chung*

*Corresponding author for this work

Research output: Contribution to journalConference article

2 Scopus citations

Abstract

In this paper, we report a novel three-axis MEMS DC magnetic sensor using magnetic force interaction and piezoelectric effect. The sensor includes a back-side-etched silicon diaphragm, a sol-gel PZT thin film with electrodes, and two patterned electroplated Ni thick films. Each patterned Ni film has specific magnetization direction, defined as specific sensing area. As a DC magnetic fields is applied to the sensor, impulse magnetic force and torque are induced to deflect and twist specific Ni films, respectively. Through the mechanical coupling between the Ni films and the PZT film, the deflection and bending are transmitted to the PZT film to produce piezoelectric peak voltages. Experimental results show that, by analysing full duration and half maximum of voltage outputs produced in two sensing areas, the sensor is able to sense three-axial DC magnetic fields.

Original languageEnglish
Article number012104
JournalJournal of Physics: Conference Series
Volume1052
Issue number1
DOIs
StatePublished - 26 Jul 2018
Event17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017 - Kanazawa, Japan
Duration: 14 Nov 201717 Nov 2017

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