Three-axis CMOS MEMS inductive accelerometer with novel Z-axis sensing scheme

Yi Chiu*, Hao-Chiao Hong, Chi Ming Chang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

This paper reports a three-axis CMOS MEMS inductive accelerometer fabricated by a 0.18 μm CMOS process. The folded suspension beams around the single shuttle mass function as springs and inductor windings simultaneously. The winding inductance is changed upon deformation due to the shuttle mass displacement. The inductance variation is sensed by differential LC-tank oscillators. A novel z-axis inductive sensing scheme is proposed. Experiments showed sensitivities of 12.9, 21.6, and 1.2 kHz/g in the x, y, and z axes, respectively.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages410-413
Number of pages4
ISBN (Electronic)9781538627310
DOIs
StatePublished - 26 Jul 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan
Duration: 18 Jun 201722 Jun 2017

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • accelerometer
  • CMOS MEMS
  • inductive sensing
  • LC-tank oscillator
  • three-axis

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    Chiu, Y., Hong, H-C., & Chang, C. M. (2017). Three-axis CMOS MEMS inductive accelerometer with novel Z-axis sensing scheme. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 410-413). [7994074] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994074