The use of a biomolecular target for crystalline carbon nitride film deposition by Ar ion-beam sputtering without any other source of nitrogen

L. C. Chen*, T. R. Lu, C. T. Kuo, D. M. Bhusari, J. J. Wu, K. H. Chen, Teng-Ming Chen

*Corresponding author for this work

Research output: Contribution to journalArticle

34 Scopus citations

Abstract

Carbon nitride films have been synthesized by argon ion-beam sputtering from a biomolecular compound target, 8-aza-6-aminopurine (C4N6H4). The compound has a six-membered ring structure similar to that existing in the hypothetical β-C3N4. Except for the target material, no other source of nitrogen was used during sputtering deposition. It was found that crystalline carbon nitride with high N/C atomic composition ratios of 0.43-0.56 can be formed even at room temperature. The infrared spectra of the film exhibit two peaks at 1383 and 1643cm-1, corresponding to C-N and CN stretching modes, respectively. No detectable peak at 2200cm-1 (CN stretching mode) is observed. Both x-ray diffraction and transmission electron microscopy show a very strong broad peak at 3.2 Å, comparable to the d spacing of the (110) orientation in the β-C3N4 structure. However, it is suggested that the film contains a nanocrystalline phase with a crystal structure yet to be determined.

Original languageEnglish
Pages (from-to)3449-3451
Number of pages3
JournalApplied Physics Letters
Volume72
Issue number26
DOIs
StatePublished - 1 Dec 1998

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