The study of the inductive coil to the acoustic performance of electromagnetic driven microspeaker

C. Weber*, Y. C. Chen, Yu-Ting Cheng

*Corresponding author for this work

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

Electromagnetic driven MEMS speakers using Polydimethylsiloxane (PDMS) membrane have been investigated to obtain a better sound pressure level (SPL) respond in low frequency regime. The comparison between measure and COMSOL simulation of fabricated microspeakers shows that the copper coil and its electrical feedthrough have a strong effect on the rigidity of the membrane thus on the SPL. Without considering the feedthrough effect, wide bandwidth starting at low frequency can be obtained while the coil is placed in the centre of the membrane, whereas placing the coil close to the membrane border instead will give a better response in low frequency with feedthrough effect.

Original languageEnglish
Pages (from-to)384-387
Number of pages4
JournalProcedia Engineering
Volume87
DOIs
StatePublished - 1 Jan 2014
Event28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy
Duration: 7 Sep 201410 Sep 2014

Keywords

  • Audio
  • Coil placement
  • Hearing aids
  • MEMS
  • Microspeaker

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