The origin and mitigation of volcano-like morphologies in micron-thick AlGaN/AlN heteroepitaxy

Chia Yen Huang, Kai Shiang Chang, Cheng Yao Huang, Yun Hsiang Lin, Wei Chih Peng, Hung Wei Yen, Ray Ming Lin, Hao-Chung Kuo

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

We investigated the origin of morphological instability in 2 μm thick Al 0.6 Ga 0.4 N/AlN heteroepitaxy. The primary morphology was driven by the residual epitaxial strain, forming hill-like morphologies via surface diffusion. The secondary morphology was driven by the interaction between the primary morphology and dislocation clusters in the epitaxial layers. The difference in the local growth rate yields volcano-like morphologies centering on deep pits. Insertion of multi-stack superlattice transition layers between AlGaN and GaN effectively suppressed the secondary morphologies by simultaneously pre-relaxing the template and filtering treading dislocations.

Original languageEnglish
Article number072110
JournalApplied Physics Letters
Volume111
Issue number7
DOIs
StatePublished - 14 Aug 2017

Fingerprint Dive into the research topics of 'The origin and mitigation of volcano-like morphologies in micron-thick AlGaN/AlN heteroepitaxy'. Together they form a unique fingerprint.

  • Cite this

    Huang, C. Y., Chang, K. S., Huang, C. Y., Lin, Y. H., Peng, W. C., Yen, H. W., Lin, R. M., & Kuo, H-C. (2017). The origin and mitigation of volcano-like morphologies in micron-thick AlGaN/AlN heteroepitaxy. Applied Physics Letters, 111(7), [072110]. https://doi.org/10.1063/1.4999767