The optical properties of monolayer amorphous Al 2 O 3 -TiO 2 composite films used as HT-APSM blanks for ArF immersion lithography

Fu Der Lai*, C. Y. Huang, Fu-Hsiang Ko

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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Chemical Compounds

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