The influence of process parameters on the structure and morphology of pulsed plasma-polymerized octafluorotoluene films

Meng Dan Jiang; Ling Yung Wang; Hong-Cheu Lin; Ta Chin Wei; Shih Hsien Yang; Cheng Hsiang Chuang; Tsung Pei Tseng

doi:10.1080/02533839.2010.9671696

The influence of process parameters on the structure and morphology of pulsed plasma-polymerized octafluorotoluene films

Meng Dan Jiang, Ling Yung Wang, Hong-Cheu Lin^*, Ta Chin Wei, Shih Hsien Yang, Cheng Hsiang Chuang, Tsung Pei Tseng

^*Corresponding author for this work

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This work describes amorphous fluorinated polymer films deposited by pulsed plasma polymerizations of octafluorotoluene (PPP-OFT) monomers on ITO glass as the hole-injection layer of organic electroluminescent (EL) devices, in order to study the influence of sample position and duty cycle on PPP-OFT film characteristics, and also to find a good process to yield a higher retention degree of monomers and lower roughness of PPP-OFT fluorocarbon films. Experimental results revealed that PPP-OFT films deposited at positions far away from the RF coil and close to the monomer inlet showed less roughness than films deposited near the high RF-flux regions. In addition, the retention of the monomers in the PPP-OFT layer will be high if the deposition is conducted near the monomer inlet but some distance away from the RF electrode. Moreover, amorphous fluorinated polymer films can be deposited with higher fluorine to carbon (F/C) ratios and CF₂ contents at proper substrate positions by means of different sticking coefficients of free radicals dissociated by octafluorotoluene monomers.

Original language	English
Pages (from-to)	1075-1081
Number of pages	7
Journal	Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an
Volume	33
Issue number	7
DOIs	https://doi.org/10.1080/02533839.2010.9671696
State	Published - Nov 2010

Keywords

EL
Hole-injection
Octafluorotoluene
Pulsed plasma polymerizations

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Jiang, M. D., Wang, L. Y., Lin, H-C., Wei, T. C., Yang, S. H., Chuang, C. H., & Tseng, T. P. (2010). The influence of process parameters on the structure and morphology of pulsed plasma-polymerized octafluorotoluene films. Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an, 33(7), 1075-1081. https://doi.org/10.1080/02533839.2010.9671696

Jiang, Meng Dan ; Wang, Ling Yung ; Lin, Hong-Cheu ; Wei, Ta Chin ; Yang, Shih Hsien ; Chuang, Cheng Hsiang ; Tseng, Tsung Pei. / The influence of process parameters on the structure and morphology of pulsed plasma-polymerized octafluorotoluene films. In: Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an. 2010 ; Vol. 33, No. 7. pp. 1075-1081.

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title = "The influence of process parameters on the structure and morphology of pulsed plasma-polymerized octafluorotoluene films",

abstract = "This work describes amorphous fluorinated polymer films deposited by pulsed plasma polymerizations of octafluorotoluene (PPP-OFT) monomers on ITO glass as the hole-injection layer of organic electroluminescent (EL) devices, in order to study the influence of sample position and duty cycle on PPP-OFT film characteristics, and also to find a good process to yield a higher retention degree of monomers and lower roughness of PPP-OFT fluorocarbon films. Experimental results revealed that PPP-OFT films deposited at positions far away from the RF coil and close to the monomer inlet showed less roughness than films deposited near the high RF-flux regions. In addition, the retention of the monomers in the PPP-OFT layer will be high if the deposition is conducted near the monomer inlet but some distance away from the RF electrode. Moreover, amorphous fluorinated polymer films can be deposited with higher fluorine to carbon (F/C) ratios and CF2 contents at proper substrate positions by means of different sticking coefficients of free radicals dissociated by octafluorotoluene monomers.",

keywords = "EL, Hole-injection, Octafluorotoluene, Pulsed plasma polymerizations",

author = "Jiang, {Meng Dan} and Wang, {Ling Yung} and Hong-Cheu Lin and Wei, {Ta Chin} and Yang, {Shih Hsien} and Chuang, {Cheng Hsiang} and Tseng, {Tsung Pei}",

year = "2010",

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doi = "10.1080/02533839.2010.9671696",

language = "English",

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Jiang, MD, Wang, LY, Lin, H-C, Wei, TC, Yang, SH, Chuang, CH & Tseng, TP 2010, 'The influence of process parameters on the structure and morphology of pulsed plasma-polymerized octafluorotoluene films', Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an, vol. 33, no. 7, pp. 1075-1081. https://doi.org/10.1080/02533839.2010.9671696

The influence of process parameters on the structure and morphology of pulsed plasma-polymerized octafluorotoluene films. / Jiang, Meng Dan; Wang, Ling Yung; Lin, Hong-Cheu; Wei, Ta Chin; Yang, Shih Hsien; Chuang, Cheng Hsiang; Tseng, Tsung Pei.

In: Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an, Vol. 33, No. 7, 11.2010, p. 1075-1081.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - The influence of process parameters on the structure and morphology of pulsed plasma-polymerized octafluorotoluene films

AU - Jiang, Meng Dan

AU - Wang, Ling Yung

AU - Lin, Hong-Cheu

AU - Wei, Ta Chin

AU - Yang, Shih Hsien

AU - Chuang, Cheng Hsiang

AU - Tseng, Tsung Pei

PY - 2010/11

Y1 - 2010/11

N2 - This work describes amorphous fluorinated polymer films deposited by pulsed plasma polymerizations of octafluorotoluene (PPP-OFT) monomers on ITO glass as the hole-injection layer of organic electroluminescent (EL) devices, in order to study the influence of sample position and duty cycle on PPP-OFT film characteristics, and also to find a good process to yield a higher retention degree of monomers and lower roughness of PPP-OFT fluorocarbon films. Experimental results revealed that PPP-OFT films deposited at positions far away from the RF coil and close to the monomer inlet showed less roughness than films deposited near the high RF-flux regions. In addition, the retention of the monomers in the PPP-OFT layer will be high if the deposition is conducted near the monomer inlet but some distance away from the RF electrode. Moreover, amorphous fluorinated polymer films can be deposited with higher fluorine to carbon (F/C) ratios and CF2 contents at proper substrate positions by means of different sticking coefficients of free radicals dissociated by octafluorotoluene monomers.

AB - This work describes amorphous fluorinated polymer films deposited by pulsed plasma polymerizations of octafluorotoluene (PPP-OFT) monomers on ITO glass as the hole-injection layer of organic electroluminescent (EL) devices, in order to study the influence of sample position and duty cycle on PPP-OFT film characteristics, and also to find a good process to yield a higher retention degree of monomers and lower roughness of PPP-OFT fluorocarbon films. Experimental results revealed that PPP-OFT films deposited at positions far away from the RF coil and close to the monomer inlet showed less roughness than films deposited near the high RF-flux regions. In addition, the retention of the monomers in the PPP-OFT layer will be high if the deposition is conducted near the monomer inlet but some distance away from the RF electrode. Moreover, amorphous fluorinated polymer films can be deposited with higher fluorine to carbon (F/C) ratios and CF2 contents at proper substrate positions by means of different sticking coefficients of free radicals dissociated by octafluorotoluene monomers.

KW - EL

KW - Hole-injection

KW - Octafluorotoluene

KW - Pulsed plasma polymerizations

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DO - 10.1080/02533839.2010.9671696

M3 - Article

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VL - 33

SP - 1075

EP - 1081

JO - Chung-kuo Kung Ch'eng Hsueh K'an/Journal of the Chinese Institute of Engineers

JF - Chung-kuo Kung Ch'eng Hsueh K'an/Journal of the Chinese Institute of Engineers

SN - 0253-3839

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Jiang MD, Wang LY, Lin H-C, Wei TC, Yang SH, Chuang CH et al. The influence of process parameters on the structure and morphology of pulsed plasma-polymerized octafluorotoluene films. Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an. 2010 Nov;33(7):1075-1081. https://doi.org/10.1080/02533839.2010.9671696