The inductance enhancement study of spiral inductor using Ni-AAO nanocomposite core

M. C. Hsu, T. Y. Chao, Yu-Ting Cheng, C. M. Liu, Chih Chen

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

The letter presents the fabrication and characterization of on-chip spiral inductors with Ni-anodic alumina oxide (Ni-AAO) nanocomposite core. Ni nanorods with 70 nm diameter are deposited and isolated in an AAO matrix to form a layer of nanocomposite on silicon substrate. About 3% inductance enhancement to the inductor with the nanocomposite core has been observed and the enhancement can be kept up more than 6 GHz. Because the proposed inductance enhancement scheme using ferromagnetic-AAO-based nanocomposite as inductor core employs a CMOS-compatible fabrication process with the characteristics that can be further improved, it is our belief that the scheme has a great potential application for future radio frequency integrated circuitry (RFIC) manufacture.

Original languageEnglish
Article number4796318
Pages (from-to)281-285
Number of pages5
JournalIEEE Transactions on Nanotechnology
Volume8
Issue number3
DOIs
StatePublished - 1 May 2009

Keywords

  • Anodic alumina oxide (AAO)
  • Inductance
  • Magnetic resonance
  • Ni nanorods
  • Ni-anodic alumina oxide (Ni-AAO) nanocomposite core
  • Quality (Q) factor
  • Spiral inductor

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