The improvements of GaN p-i-n UV sensor on 1°off-axis sapphire substrate

Su Sir Liu*, Pei-Wen Li, W. H. Lan, Wen Jen Lin

*Corresponding author for this work

Research output: Contribution to journalArticle

4 Scopus citations


A thin gallium nitride (GaN) layer epitaxially grown on misorientation angles of a-plane 1°off-axis sapphire substrate by metal organic chemical vapor deposition (MOCVD) has exhibited excellent film qualities such as enhanced crystallinity, lower defect levels, and less etching pit density. Accordingly, the GaN p-i-n photodetector fabricated on 1°off-axis sapphire substrate the dark current density decreased from 2.4 × 10-9 A/cm2 to 1.82 × 10-11 A/cm2 at -3 V, the responsivity increased from 0.06 A/W to 0.105 A/W at 360 nm with no applied bias; the ultraviolet/visible (UV/vis) rejection ratio increased from 2.32 × 10 3 to 2.48 × 104 (comparing wavelength 360-450 nm). A superior device performance could be achieved, as device fabricated on 1°off-axis sapphire substrate.

Original languageEnglish
Pages (from-to)86-91
Number of pages6
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Issue number1-2
StatePublished - 25 Jul 2005


  • AFM
  • GaN
  • Off-axis
  • Responsivity
  • UV sensor

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