@inproceedings{7a5237018bc74659af30f05e6a4e6e71,
title = "The implementation of a novel magnified cascade configuration using a vertical electrostatic actuator",
abstract = "An electrostatic actuator with novel cascade configuration called Cascade Vertical Actuator (CVA) is developed to magnify the actuation stroke. The CVA combines the vertical comb drive and multi-stage structure to form a stacked actuation configuration that can be used to overcome the stroke constrain of a single vertical comb drive. The static FEM simulation and dynamic modeling are used to verify the proposed design. The CVA device is fabricated through a standard 0.35μn 2P4M (double polysilicon quadruple metal) CMOS process and post-CMOS process. Experimental results indicated the stroke of the proposed CVA can magnify three times than the standard vertical comb drive with the same chip size.",
keywords = "Cascade configurationt, CMOS-MEMS, Comb actuator, Vertical actuator",
author = "Jin-Chern Chiou and Kuo, {C. F.} and Lin, {Y. J.}",
year = "2006",
month = dec,
day = "1",
language = "English",
isbn = "1424400783",
series = "2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006",
pages = "913--916",
booktitle = "2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006",
note = "null ; Conference date: 17-06-2006 Through 20-06-2006",
}