The implementation of a novel magnified cascade configuration using a vertical electrostatic actuator

Jin-Chern Chiou, C. F. Kuo, Y. J. Lin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

An electrostatic actuator with novel cascade configuration called Cascade Vertical Actuator (CVA) is developed to magnify the actuation stroke. The CVA combines the vertical comb drive and multi-stage structure to form a stacked actuation configuration that can be used to overcome the stroke constrain of a single vertical comb drive. The static FEM simulation and dynamic modeling are used to verify the proposed design. The CVA device is fabricated through a standard 0.35μn 2P4M (double polysilicon quadruple metal) CMOS process and post-CMOS process. Experimental results indicated the stroke of the proposed CVA can magnify three times than the standard vertical comb drive with the same chip size.

Original languageEnglish
Title of host publication2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Pages913-916
Number of pages4
StatePublished - 1 Dec 2006
Event2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006 - Cincinnati, OH, United States
Duration: 17 Jun 200620 Jun 2006

Publication series

Name2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Volume2

Conference

Conference2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
CountryUnited States
CityCincinnati, OH
Period17/06/0620/06/06

Keywords

  • Cascade configurationt
  • CMOS-MEMS
  • Comb actuator
  • Vertical actuator

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