An electrostatic actuator with novel cascade configuration called Cascade Vertical Actuator (CVA) is developed to magnify the actuation stroke. The CVA combines the vertical comb drive and multi-stage structure to form a stacked actuation configuration that can be used to overcome the stroke constrain of a single vertical comb drive. The static FEM simulation and dynamic modeling are used to verify the proposed design. The CVA device is fabricated through a standard 0.35μn 2P4M (double polysilicon quadruple metal) CMOS process and post-CMOS process. Experimental results indicated the stroke of the proposed CVA can magnify three times than the standard vertical comb drive with the same chip size.