@inproceedings{b03ae16b6d1c41e794933e505959392b,
title = "The Ge enhance the sensitivity for bio-sensor",
abstract = "Nanowire is mainly used in biological sensor because it has the high surface-to-volume ratio. In this study, we have successfully fabricated the N-SiGe nanowire with different Ge concentration by side-wall spacer technique respectively. The 3-amino-propyltrime-thoxy-silane (APTS) was used to modify the surface, which can connect the bio-linker. The conductance of SiGe nanowire increases owing to APTS with positive charge. The bis (sulfosuccinimidyl) suberate sodium (BS3) as the bio-linker connects to APTS, and the conductance decreases because of negative charge. Finally, the protein immunoglobulin G (IGG) is linked to BS3, and the conductance reduces for negative charge. Comparing the conductance change; the SiGe nanowire with higher Ge concentration improved the sensitivity. But the over-higher Ge concentration (40%) did not increase the sensitivity; the reason maybe the higher defect appears at the surface as higher Ge concentration.",
author = "Kow-Ming Chang and Kuo, {Jiun Ming} and Chao, {Wen Chan} and Liang, {Chia Jung} and Wu, {Heng Hsin} and Tzeng, {Wen Hsien} and Wu, {Tzu Liu}",
year = "2008",
month = oct,
day = "1",
doi = "10.1109/INEC.2008.4585607",
language = "English",
isbn = "9781424415731",
series = "2008 2nd IEEE International Nanoelectronics Conference, INEC 2008",
pages = "811--814",
booktitle = "2008 2nd IEEE International Nanoelectronics Conference, INEC 2008",
note = "null ; Conference date: 24-03-2008 Through 27-03-2008",
}