The fabrication of laser array by holographic interference lithography

Chuli Chao*, Chi Yu Ni, Rong Xuan, Hao-Chung Kuo

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We have developed a novel method to produce different grating periods in one chip and applied this in the fabrication for laser array. The result shows accurate controllability of lasing wavelength and low threshold currents.

Original languageEnglish
Title of host publication2007 Quantum Electronics and Laser Science Conference, QELS
DOIs
StatePublished - 1 Dec 2007
Event2007 Quantum Electronics and Laser Science Conference, QELS - Baltimore, MD, United States
Duration: 6 May 200711 May 2007

Publication series

NameConference on Quantum Electronics and Laser Science (QELS) - Technical Digest Series

Conference

Conference2007 Quantum Electronics and Laser Science Conference, QELS
CountryUnited States
CityBaltimore, MD
Period6/05/0711/05/07

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