The fabrication of a programmable via using phase-change material in CMOS-compatible technology

Kuan-Neng Chen*, Lia Krusin-Elbaum

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

We demonstrate an energy-efficient programmable via concept using indirectly heated phase-change material. This via structure has maximum phase-change volume to achieve a minimum on resistance for high performance logic applications. Process development and material investigations for this device structure are reported. The device concept is successfully demonstrated in a standard CMOS-compatible technology capable of multiple cycles between on/off states for reconfigurable applications.

Original languageEnglish
Article number134001
JournalNanotechnology
Volume21
Issue number13
DOIs
StatePublished - 19 Mar 2010

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