The effects of super-steep-retrograde indium channel profile on deep submicron n-channel metal-oxide-semiconductor field-effect transistor

Coming Chen, Sun Jay Chang, Jih Wen Chou, Tony Lin, Wen Kuan Yeh, Chun Yen Chang, Wen Zheng Luo, Yao Jen Lee, Tien-Sheng Chao, Tiao Yuan Huang

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Physics & Astronomy

Engineering & Materials Science