The effects of post excimer laser annealing on (Ba,Sr)TiO3 thin films at low substrate temperatures

Der Chi Shye*, Bi Shiou Chiou, Chuan Chou Hwang, Cheng Chung Jaing, Hsien Wen Hsu, Jyh Shin Chen, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to journalArticle

12 Scopus citations

Abstract

The amorphous (Ba,Sr)TiO3 (α-BST) films sputtered onto the Pt/TiN/Ti/Si substrates are greatly improved using the excimer laser annealing (ELA) technique of wavelength 248 nm at low substrate temperature 300°C. The dielectric constant of the α-BST film is remarkably enhanced from 80 to over 250 after ELA treatment. The heat conduction analysis indicates that a very shallow light absorption depth of the wavelength 248 nm for the BST film behaves an excellent thermal property, which doesn't damage the underlayer films during ELA treatment. Besides, the leakage current of ELA-BST films is strongly influenced by the laser energy fluence (LEF). The detailed mechanisms of the crystallinity and the electric properties are systematically studied in this report.

Original languageEnglish
Pages (from-to)1680-1685
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number4 A
DOIs
StatePublished - 1 Apr 2003

Keywords

  • BST films
  • Crystallinity
  • Excimer laser annealing
  • Heat conduction
  • Light absorption
  • Low substrate temperature

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