The effects of annealing temperature and sputtering power on the structure and magnetic properties of the Co-Fe-Zr-B thin films

Guo Ju Chen*, Sheng Rui Jian, Jason Shian Ching Jang, Yung Hui Shih, Yuan Tsung Chen, Shien Uang Jen, Jenh-Yih Juang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

The microstructure and magnetic properties of the amorphous Co-Fe-Zr-B thin films grown on glass substrates by dc magnetron sputtering are investigated using differential scanning calorimetry (DSC), transmission electron microscopy (TEM), and superconducting quantum interference device (SQUID) techniques. The Co-Fe-Zr-B thin films deposited at room temperature were annealed at temperatures ranged from 683 K to 773 K. Experimental results indicated that the coercivity (H c) of the Co-Fe-Zr-B thin films is significantly influenced by residual stress and crystalline phases within the films. The correlation of the coercivity and the microstructure of Co-Fe-Zr-B thin films are discussed. After annealed at 683 K, the coercivity of the Co-Fe-Zr-B film was as low as 1.2 Oe.

Original languageEnglish
Pages (from-to)127-131
Number of pages5
JournalIntermetallics
Volume30
DOIs
StatePublished - 1 Nov 2012

Keywords

  • B. Glasses, metallic
  • B. Magnetic properties
  • B. Thermal stability
  • F. Calorimetry
  • F. Microscopy

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