The effect of H 2 treatment on heterojunction with intrinsic thin layer (HIT) solar cell perfromance using 40.68MHz VHF-PECVD system

Man Chi Huang; Chia Hua Chang; Fang Ming Li; Ching Hsiang Hsu; Binh Tinh Tran; S. S. Tang; Kung Liang Lin; Yueh Chin Lin; Fu Ching Tung; Muh Wang Liang; Edward Yi Chang

doi:10.1109/PVSC.2011.6186575

The effect of H ₂ treatment on heterojunction with intrinsic thin layer (HIT) solar cell perfromance using 40.68MHz VHF-PECVD system

Man Chi Huang^*, Chia Hua Chang, Fang Ming Li, Ching Hsiang Hsu, Binh Tinh Tran, S. S. Tang, Kung Liang Lin, Yueh Chin Lin, Fu Ching Tung, Muh Wang Liang, Edward Yi Chang

^*Corresponding author for this work

Department of Materials Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In this report, we studied the fabrication of heterojunction with intrinsic thin layer (HIT) solar cell, which was deposited by using very high frequency chemical vapor deposition (VHF-PECVD), at a high deposition rate under a low process temperature. The HIT solar cell has a very thin emitter layer on the light-incident surface (about 10nm) and the contact region was passivated by hydrogen (H2) plasma treatment to improve solar cell performance. With the passivation, the carrier transport may be enhanced and the extraction of photo current may also be increased. These features can make the Si-bulk absorbs more photons and extract more photo-electric current [1].

Original language	English
Title of host publication	Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011
Pages	3001-3004
Number of pages	4
DOIs	https://doi.org/10.1109/PVSC.2011.6186575
State	Published - 1 Dec 2011
Event	37th IEEE Photovoltaic Specialists Conference, PVSC 2011 - Seattle, WA, United States Duration: 19 Jun 2011 → 24 Jun 2011

Publication series

Name	Conference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)	0160-8371

Conference

Conference	37th IEEE Photovoltaic Specialists Conference, PVSC 2011
Country	United States
City	Seattle, WA
Period	19/06/11 → 24/06/11

Access to Document

10.1109/PVSC.2011.6186575

Link to publication in Scopus

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Huang, M. C., Chang, C. H., Li, F. M., Hsu, C. H., Tran, B. T., Tang, S. S., Lin, K. L., Lin, Y. C., Tung, F. C., Liang, M. W., & Chang, E. Y. (2011). The effect of H ₂ treatment on heterojunction with intrinsic thin layer (HIT) solar cell perfromance using 40.68MHz VHF-PECVD system. In Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011 (pp. 3001-3004). [6186575] (Conference Record of the IEEE Photovoltaic Specialists Conference). https://doi.org/10.1109/PVSC.2011.6186575

Huang, Man Chi ; Chang, Chia Hua ; Li, Fang Ming ; Hsu, Ching Hsiang ; Tran, Binh Tinh ; Tang, S. S. ; Lin, Kung Liang ; Lin, Yueh Chin ; Tung, Fu Ching ; Liang, Muh Wang ; Chang, Edward Yi. / The effect of H ₂ treatment on heterojunction with intrinsic thin layer (HIT) solar cell perfromance using 40.68MHz VHF-PECVD system. Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011. 2011. pp. 3001-3004 (Conference Record of the IEEE Photovoltaic Specialists Conference).

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title = "The effect of H 2 treatment on heterojunction with intrinsic thin layer (HIT) solar cell perfromance using 40.68MHz VHF-PECVD system",

abstract = "In this report, we studied the fabrication of heterojunction with intrinsic thin layer (HIT) solar cell, which was deposited by using very high frequency chemical vapor deposition (VHF-PECVD), at a high deposition rate under a low process temperature. The HIT solar cell has a very thin emitter layer on the light-incident surface (about 10nm) and the contact region was passivated by hydrogen (H2) plasma treatment to improve solar cell performance. With the passivation, the carrier transport may be enhanced and the extraction of photo current may also be increased. These features can make the Si-bulk absorbs more photons and extract more photo-electric current [1].",

author = "Huang, {Man Chi} and Chang, {Chia Hua} and Li, {Fang Ming} and Hsu, {Ching Hsiang} and Tran, {Binh Tinh} and Tang, {S. S.} and Lin, {Kung Liang} and Lin, {Yueh Chin} and Tung, {Fu Ching} and Liang, {Muh Wang} and Chang, {Edward Yi}",

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month = dec,

day = "1",

doi = "10.1109/PVSC.2011.6186575",

language = "English",

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series = "Conference Record of the IEEE Photovoltaic Specialists Conference",

pages = "3001--3004",

booktitle = "Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011",

note = "null ; Conference date: 19-06-2011 Through 24-06-2011",

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Huang, MC, Chang, CH, Li, FM, Hsu, CH, Tran, BT, Tang, SS, Lin, KL, Lin, YC, Tung, FC, Liang, MW & Chang, EY 2011, The effect of H ₂ treatment on heterojunction with intrinsic thin layer (HIT) solar cell perfromance using 40.68MHz VHF-PECVD system. in Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011., 6186575, Conference Record of the IEEE Photovoltaic Specialists Conference, pp. 3001-3004, 37th IEEE Photovoltaic Specialists Conference, PVSC 2011, Seattle, WA, United States, 19/06/11. https://doi.org/10.1109/PVSC.2011.6186575

The effect of H ₂ treatment on heterojunction with intrinsic thin layer (HIT) solar cell perfromance using 40.68MHz VHF-PECVD system. / Huang, Man Chi; Chang, Chia Hua; Li, Fang Ming; Hsu, Ching Hsiang; Tran, Binh Tinh; Tang, S. S.; Lin, Kung Liang; Lin, Yueh Chin; Tung, Fu Ching; Liang, Muh Wang; Chang, Edward Yi.

Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011. 2011. p. 3001-3004 6186575 (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Hsu, Ching Hsiang

AU - Tran, Binh Tinh

AU - Tang, S. S.

AU - Lin, Kung Liang

AU - Lin, Yueh Chin

AU - Tung, Fu Ching

AU - Liang, Muh Wang

AU - Chang, Edward Yi

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AB - In this report, we studied the fabrication of heterojunction with intrinsic thin layer (HIT) solar cell, which was deposited by using very high frequency chemical vapor deposition (VHF-PECVD), at a high deposition rate under a low process temperature. The HIT solar cell has a very thin emitter layer on the light-incident surface (about 10nm) and the contact region was passivated by hydrogen (H2) plasma treatment to improve solar cell performance. With the passivation, the carrier transport may be enhanced and the extraction of photo current may also be increased. These features can make the Si-bulk absorbs more photons and extract more photo-electric current [1].

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Huang MC, Chang CH, Li FM, Hsu CH, Tran BT, Tang SS et al. The effect of H ₂ treatment on heterojunction with intrinsic thin layer (HIT) solar cell perfromance using 40.68MHz VHF-PECVD system. In Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011. 2011. p. 3001-3004. 6186575. (Conference Record of the IEEE Photovoltaic Specialists Conference). https://doi.org/10.1109/PVSC.2011.6186575