The Chemical Stain Inspection of Polysilicon Solar Cell Wafer by the Fuzzy Theory Method

Chern Sheng Lin*, Chih Wei Lin, Shih Wei Yang, Shir-Kuan Lin, Chuang Chien Chiu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


This study proposed an automatic optical inspection (AOI) technique to improve the inspection of chemical stains on solar wafers. Poly-silicon solar cell wafers were inspected for chemical stains, and the inspection was rapid and stable. The system used a laser-reflection-point-based AOI method for solar wafer chemical stain inspection. Based on the fuzzy theory, the image binarization algorithm could efficiently filter irrelevant image information, and the back-propagation method was also utilized to determine if the image was stained. The inspection algorithm integrated fuzzy theory and the back-propagation method in order to shorten the comparison time and quickly find the target. The experiment proved that the validity of the proposed method could achieve a recognition rate of 98% from among 1000 images.

Original languageEnglish
Pages (from-to)391-406
Number of pages16
JournalIntelligent Automation and Soft Computing
Issue number3
StatePublished - 1 Aug 2013


  • Back-propagation
  • Chemical stain inspection
  • Fuzzy theory
  • Image binarization algorithm
  • Laser-reflection-point based AOI method
  • Solar wafer
  • Stain recognition

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