The CeO2 sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications

Che Chun Liu, Ming Ling Lee, Kow-Ming Chang, Shan Wei Chang, Hsiang Chen, Chyuan Haur Kao, Wei Kung Sung, Min Hau Kuo, Che Wei Chang, Chia Lun Chang, Chun Fu Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the paper, the EIS structure with high-k CeO2 sensing film has more responsive to H+ relative to Na+ and K+. The CeO2 sensing membrane annealed with O2 at 800°C shows a higher sensitivity of 58.76 mV/pH, higher linearity, lower hysteresis voltage of 5.97 mV and lower drift rate of 0.96 mV/hr than the other conditions.

Original languageEnglish
Title of host publicationProceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014
EditorsJia Zhou, Ting-Ao Tang
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479932962
DOIs
StatePublished - 23 Jan 2014
Event2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 - Guilin, China
Duration: 28 Oct 201431 Oct 2014

Publication series

NameProceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014

Conference

Conference2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014
CountryChina
CityGuilin
Period28/10/1431/10/14

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  • Cite this

    Liu, C. C., Lee, M. L., Chang, K-M., Chang, S. W., Chen, H., Kao, C. H., Sung, W. K., Kuo, M. H., Chang, C. W., Chang, C. L., & Lin, C. F. (2014). The CeO2 sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications. In J. Zhou, & T-A. Tang (Eds.), Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 [7021639] (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSICT.2014.7021639