The α-Si/SiGe core/shell nano-wire as highly sensitive bio-sensor

Kow-Ming Chang*, Chu Feng Chen, Chiung Hui Lai, Chung Hsien Liu, Yu Bin Wang, Chin Ning Wu, Cheng Ting Hsieh

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Reducing the width of a nano-wire increases its surface to volume ratio, increasing the sensitivity of its conductivity to charges on its surface. Our previous studies have shown that increasing the Ge fraction in Si 1-xGe x nano-wires improves their sensitivity as biosensing. In this work, an α-Si/SiGe core/shell nano-wire is successfully fabricated using side-wall spacer method. The maximum sensitivity of a nano-wire bio-sensor with an optimized α-Si/SiGe thickness ratio is investigated.

Original languageEnglish
Title of host publicationNanotechnology (General) - 219th ECS Meeting
Number of pages12
StatePublished - 1 Dec 2011
EventNanotechnology General Session - 219th ECS Meeting - Montreal, QC, Canada
Duration: 1 May 20116 May 2011

Publication series

NameECS Transactions
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737


ConferenceNanotechnology General Session - 219th ECS Meeting
CityMontreal, QC

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