Reducing the width of a nano-wire increases its surface to volume ratio, increasing the sensitivity of its conductivity to charges on its surface. Our previous studies have shown that increasing the Ge fraction in Si 1-xGe x nano-wires improves their sensitivity as biosensing. In this work, an α-Si/SiGe core/shell nano-wire is successfully fabricated using side-wall spacer method. The maximum sensitivity of a nano-wire bio-sensor with an optimized α-Si/SiGe thickness ratio is investigated.
|Title of host publication||Nanotechnology (General) - 219th ECS Meeting|
|Number of pages||12|
|State||Published - 1 Dec 2011|
|Event||Nanotechnology General Session - 219th ECS Meeting - Montreal, QC, Canada|
Duration: 1 May 2011 → 6 May 2011
|Conference||Nanotechnology General Session - 219th ECS Meeting|
|Period||1/05/11 → 6/05/11|