@inproceedings{67685bb083bd486ab07eabddf8b3dca1,
title = "The α-Si/SiGe core/shell nano-wire as highly sensitive bio-sensor",
abstract = "Reducing the width of a nano-wire increases its surface to volume ratio, increasing the sensitivity of its conductivity to charges on its surface. Our previous studies have shown that increasing the Ge fraction in Si 1-xGe x nano-wires improves their sensitivity as biosensing. In this work, an α-Si/SiGe core/shell nano-wire is successfully fabricated using side-wall spacer method. The maximum sensitivity of a nano-wire bio-sensor with an optimized α-Si/SiGe thickness ratio is investigated.",
author = "Kow-Ming Chang and Chen, {Chu Feng} and Lai, {Chiung Hui} and Liu, {Chung Hsien} and Wang, {Yu Bin} and Wu, {Chin Ning} and Hsieh, {Cheng Ting}",
year = "2011",
month = dec,
day = "1",
doi = "10.1149/1.3640402",
language = "English",
isbn = "9781607682707",
series = "ECS Transactions",
number = "10",
pages = "31--42",
booktitle = "Nanotechnology (General) - 219th ECS Meeting",
edition = "10",
note = "null ; Conference date: 01-05-2011 Through 06-05-2011",
}