The α-Si/SiGe core/shell nano-wire as highly sensitive bio-sensor

Kow-Ming Chang; Chu Feng Chen; Chiung Hui Lai; Chung Hsien Liu; Yu Bin Wang; Chin Ning Wu; Cheng Ting Hsieh

doi:10.1149/1.3640402

The α-Si/SiGe core/shell nano-wire as highly sensitive bio-sensor

Kow-Ming Chang^*, Chu Feng Chen, Chiung Hui Lai, Chung Hsien Liu, Yu Bin Wang, Chin Ning Wu, Cheng Ting Hsieh

^*Corresponding author for this work

Department of Electronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Reducing the width of a nano-wire increases its surface to volume ratio, increasing the sensitivity of its conductivity to charges on its surface. Our previous studies have shown that increasing the Ge fraction in Si _1-xGe _x nano-wires improves their sensitivity as biosensing. In this work, an α-Si/SiGe core/shell nano-wire is successfully fabricated using side-wall spacer method. The maximum sensitivity of a nano-wire bio-sensor with an optimized α-Si/SiGe thickness ratio is investigated.

Original language	English
Title of host publication	Nanotechnology (General) - 219th ECS Meeting
Pages	31-42
Number of pages	12
Edition	10
DOIs	https://doi.org/10.1149/1.3640402
State	Published - 1 Dec 2011
Event	Nanotechnology General Session - 219th ECS Meeting - Montreal, QC, Canada Duration: 1 May 2011 → 6 May 2011

Publication series

Name	ECS Transactions
Number	10
Volume	35
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

Conference

Conference	Nanotechnology General Session - 219th ECS Meeting
Country	Canada
City	Montreal, QC
Period	1/05/11 → 6/05/11

Access to Document

10.1149/1.3640402

Link to publication in Scopus

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title = "The α-Si/SiGe core/shell nano-wire as highly sensitive bio-sensor",

abstract = "Reducing the width of a nano-wire increases its surface to volume ratio, increasing the sensitivity of its conductivity to charges on its surface. Our previous studies have shown that increasing the Ge fraction in Si 1-xGe x nano-wires improves their sensitivity as biosensing. In this work, an α-Si/SiGe core/shell nano-wire is successfully fabricated using side-wall spacer method. The maximum sensitivity of a nano-wire bio-sensor with an optimized α-Si/SiGe thickness ratio is investigated.",

author = "Kow-Ming Chang and Chen, {Chu Feng} and Lai, {Chiung Hui} and Liu, {Chung Hsien} and Wang, {Yu Bin} and Wu, {Chin Ning} and Hsieh, {Cheng Ting}",

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The α-Si/SiGe core/shell nano-wire as highly sensitive bio-sensor. / Chang, Kow-Ming; Chen, Chu Feng; Lai, Chiung Hui; Liu, Chung Hsien; Wang, Yu Bin; Wu, Chin Ning; Hsieh, Cheng Ting.

Nanotechnology (General) - 219th ECS Meeting. 10. ed. 2011. p. 31-42 (ECS Transactions; Vol. 35, No. 10).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Wu, Chin Ning

AU - Hsieh, Cheng Ting

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