@inproceedings{6ae25faac51f4e35befec667258a26a5,
title = "Synthesis of wafer-scale WSe2 by WOx selenization on SiO2 / Si substrates",
abstract = "Scalable synthesis of thin tungsten diselenide (WSe2) films on 4-inch silicon substrate with 80 nm silicon dioxide (SiO2) is demonstrated. Cross-sectional transmission electron microscopy (TEM) reveals good control of WSe2 layers. Raman spectroscopy confirms high quality crystal of WSe2 is achieved. Back-gated field-effect transistors (FETs) fabricated on these thin films exhibit p-channel characteristics with a good on/off current ratio larger than 1.2 × 102.",
author = "Chu, {Yung Ching} and Jong, {Chao An} and Ho, {Yen Teng} and Ming Zhang and Chien, {Po Yen} and Hsu, {Hung Ru} and Chen, {Hung Yi} and Tu, {Yung Yi} and Pande, {Krishna P.} and Woo, {Jason C.S.} and Chang, {Edward Yi}",
year = "2016",
month = sep,
day = "27",
doi = "10.1109/SNW.2016.7577982",
language = "English",
series = "2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "54--55",
booktitle = "2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016",
address = "United States",
note = "null ; Conference date: 12-06-2016 Through 13-06-2016",
}