Synthesis and characterization of Cu/CoFe2O4 magnetic nanocomposite for RFIC application

Tzu Yuan Chao, Yu-Ting Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

A Cu/CoFe2O4 nanocomposite film and related CMOS compatible processes using alkaline noncyanide based copper plating solution have been successfully synthesized, characterized and proposed for RFIC application in this paper. The SQUID (Superconducting Quantum Interference Device Magnetometer) measurement indicates that magnetic properties of Cu can be modified from diamagnetism to ferromagnetism via the incorporation of CoFe 2O4 superparamagnetic nanoparticles into a Cu matrix to form the Cu/CoFe2O4 nanocomposite film which is plated in the bath with 5g/L CoFe2O4. Without largely sacrificing the reduction of electrical conductivity of Cu (<10%), the Cu/CoFe 2O4 nanocomposite material shows its potential for the fabrication of high performance cost-effective on-chip spiral inductor due to the effective reductions of inductor size, self-resonant frequency, and eddy current loss.

Original languageEnglish
Title of host publication2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Pages810-813
Number of pages4
StatePublished - 1 Dec 2006
Event2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006 - Cincinnati, OH, United States
Duration: 17 Jun 200620 Jun 2006

Publication series

Name2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Volume2

Conference

Conference2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
CountryUnited States
CityCincinnati, OH
Period17/06/0620/06/06

Keywords

  • Electroplated Cu/CoFeO magnetic nanocomposite
  • On-chip spiral inductor
  • RFIC
  • Superparamagnetic

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