Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride

Hsin-Tien Chiu*, Shiow Huey Chuang, Chung En Tsai, Gene Hsiang Lee, Shie Ming Peng

*Corresponding author for this work

Research output: Contribution to journalArticle

34 Scopus citations

Abstract

Abstract - New single-source precursor to tantalum nitride thin films, (ButN)Ta(NEt2)3, and related complexes, (RN)Ta(NEt2)3 (R = Pri and Prn), were prepared by reacting corresponding (RN)TaCl3Py2 complexes (R = But, Pri and Prn) with LiNEt2 in hydrocarbon solvents. The structure of (ButN)TaCl3py2 was determined by X-ray crystallography.

Original languageEnglish
Pages (from-to)2187-2190
Number of pages4
JournalPolyhedron
Volume17
Issue number13-14
DOIs
StatePublished - 1 Jan 1998

Keywords

  • CVD precursors
  • Organoimide complexes
  • Tantalum complexes

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