Suppression of “volcano” morphology and parasitic defect luminescence in AlGaN-based deep-UV light-emitting diode epitaxy

Chia Yen Huang, Tsung Yen Liu, Shih Ming Huang, Kai Hsiang Chang, Tsu Ying Tai, Chieh Hsiung Kuan, Joseph Tung Chieh Chang, Ray Ming Lin*, Hao-Chung Kuo

*Corresponding author for this work

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Abstract

In this study we overcame several critical growth issues related to epitaxy in AlGaN deep-ultraviolet light-emitting diodes. Irregular-shaped pits with dislocation clusters were observed in micron-thick layers of AlGaN on AlN. The strain-induced morphology and defects were suppressed after the insertion of superlattice transition layers between the AlGaN and AlN layers. The defect luminescence in the active region was governed by radiative recombination through the oxygen shallow donors and deep acceptors related to III-vacancies. After optimization of the growth conditions and a decrease in growth interruption, the intensity of the parasitic blue-band emission was suppressed by up to 95%. Energy dispersive spectroscopy suggests that the desorption of gallium from the surface is the major source of the III-vacancies.

Original languageEnglish
Article number102285
JournalResults in Physics
Volume13
DOIs
StatePublished - 1 Jun 2019

Keywords

  • Defects
  • Light-emitting diodes
  • Line defects
  • Metalorganic vapor phase epitaxy
  • Point defects
  • Surface structures

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    Huang, C. Y., Liu, T. Y., Huang, S. M., Chang, K. H., Tai, T. Y., Kuan, C. H., Chang, J. T. C., Lin, R. M., & Kuo, H-C. (2019). Suppression of “volcano” morphology and parasitic defect luminescence in AlGaN-based deep-UV light-emitting diode epitaxy. Results in Physics, 13, [102285]. https://doi.org/10.1016/j.rinp.2019.102285