Subwavelength apodized grating coupler for silicon photonics waveguide coupling

Chihchi Chang, Yijang Hsu, Hsaunming Kuo, Yinchieh Lai

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A high coupling efficiency grating coupler with subwavelength nanostructure for grating strength apodization is investigated for silicon photonics waveguide coupling application. Based on the 220 nm silicon-on-insulator (SOI) platform with 70 nm shallow etch and 160 nm poly-silicon overlay, maximum coupling efficiency of -1.72dB at 1550 nm wavelength and 1 dB bandwidth of 42 nm are achieved without the use of any back-reflector.

Original languageEnglish
Title of host publication25th Opto-Electronics and Communications Conference, OECC 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728154459
DOIs
StatePublished - 4 Oct 2020
Event25th Opto-Electronics and Communications Conference, OECC 2020 - Taipei, Taiwan
Duration: 4 Oct 20208 Oct 2020

Publication series

Name25th Opto-Electronics and Communications Conference, OECC 2020

Conference

Conference25th Opto-Electronics and Communications Conference, OECC 2020
CountryTaiwan
CityTaipei
Period4/10/208/10/20

Keywords

  • Diffraction gratings
  • silicon photonics
  • subwavelength structures

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