SU-8 rib waveguide Bragg grating filter using composite stamp and solvent-assisted microcontact molding technique

Cheng-Sheng Huang*, Yue Bun Pun, Wei Chih Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

We present a simple fabrication technique using a hydrophobic composite elastomer for patterning an SU-8-based rib waveguide Bragg grating filter via solvent-assisted microcontact molding (SAMIM). The proposed technique utilizes a two-layered composite stamp made of polydimethylsiloxane and hard polydimethylsiloxane, which enables both the rib waveguide and surface relief grating structure to be patterned simultaneously. The SAMIM method realizes patterning at ambient temperatures with the weight of the mold applying all the pressure necessary. By allowing the mold to absorb solvent when in contact with the polymer, the solvent dissolves or swells the polymer's surface, creating the desired pattern. This composite mold successfully demonstrates the SAMIM creation of the SU-8 rib waveguide and gratings, paving the way for a facile and efficient reproduction of a polymeric rib waveguide grating filter. Based on experimental results, the stamp demonstrates an operational life span in excess of 10 successful replications, utilizing a Bragg grating test pattern with a grating period of ∼492 nm, a depth of ∼250 nm, and a total length of 12 mm. The resulting waveguides show a band-rejection gain of -17 dB at the center wavelength of 1545 nm and a 3-dB bandwidth of 2.5 nm.

Original languageEnglish
Article number023013
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume9
Issue number2
DOIs
StatePublished - 1 Jan 2010

Keywords

  • Bragg grating
  • Polymeric waveguide
  • SU-8
  • Soft lithography

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