Study on nanoscale bombardment dynamics using molecular dynamics

Y. L. Yeh, B. H. Chen, Chao Ho Lan, Jie Ren Ku, Chung-Wei Cheng, Shing Cheng Chang, Cha'o Kuang Chen, M. J. Jang, C. C. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The present study has investigated the cluster deposition process of thin film formation. MD simulation has been employed to study the morphology of the collision system and to investigate the transient behavior, which occurred between the atoms of the deposited cluster and the substrate. The substrate relaxation process and the influence of the incident energy were also discussed. A traveling condition of the cluster for random incidences was applied in the simulations, and the ratio of translational and total kinetic energy of clusters were varied to observe their influence on the cluster's diffusivity. It was found that the system's reconstruction phenomena tended to recover the lattice structure, which was disordered by the impact cluster. After thermal equilibrium, the partial wetting behaviors or cluster embedded morphology were observed according to different incident energy. In the "impact process", the high local temperature and high heat transfer rate were observed due to the high compressibility of the impact zone. By changing the ratio of translational and total kinetic energy of clusters, the simulation results indicated that translational kinetic energy of cluster contributed to the local temperature raising and the interpenetration of cluster atoms, while the vibrational energy benefited the spreading behaviors of cluster.

Original languageEnglish
Title of host publication2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
Pages18-23
Number of pages6
DOIs
StatePublished - 1 Dec 2009
Event2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009 - Tainan, Taiwan
Duration: 18 Oct 200921 Oct 2009

Publication series

Name2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009

Conference

Conference2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
CountryTaiwan
CityTainan
Period18/10/0921/10/09

Keywords

  • Cluster impact dynamics
  • Molecular dynamics
  • Thin film

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