Study of the mesa etched tri-gate InAs HEMTs with extremely low SS for low-power logic applications

Yueh Chin Lin*, Jing Neng Yao, Hisang Hua Hsu, Ying Chieh Wong, Chi Yi Huang, Heng-Tung Hsu, Hiroshi Iwai, Edward Yi Chang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

InAs HEMTs with a mesa etch structure that connects the Schottky gate through mesa sidewall with InAlAs layers were fabricated. The gate metal connection to the InAlAs layers increases the positive potential of the channel region through the gate bias, resulting in a steep SS due to a positive potential feedback. The mesa etch InAs HEMT shows an excellent performance with an extremely low minimum SS value of 46 mV/decade with the high G m, max /SS of 33 and a high Ion/Ioff ratio of 6.6×104 at Vds = 1V.

Original languageEnglish
Title of host publicationChina Semiconductor Technology International Conference 2018, CSTIC 2018
EditorsHanming Wu, Peilin Song, Qinghuang Lin, Yuchun Wang, Cor Claeys, Hsiang-Lang Lung, Ying Zhang, Steve Liang, Yiyu Shi, Ru Huang, Zhen Guo, Kafai Lai
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-3
Number of pages3
ISBN (Electronic)9781538653081
DOIs
StatePublished - 29 May 2018
Event2018 China Semiconductor Technology International Conference, CSTIC 2018 - Shanghai, China
Duration: 11 Mar 201812 Mar 2018

Publication series

NameChina Semiconductor Technology International Conference 2018, CSTIC 2018

Conference

Conference2018 China Semiconductor Technology International Conference, CSTIC 2018
CountryChina
CityShanghai
Period11/03/1812/03/18

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  • Cite this

    Lin, Y. C., Yao, J. N., Hsu, H. H., Wong, Y. C., Huang, C. Y., Hsu, H-T., Iwai, H., & Chang, E. Y. (2018). Study of the mesa etched tri-gate InAs HEMTs with extremely low SS for low-power logic applications. In H. Wu, P. Song, Q. Lin, Y. Wang, C. Claeys, H-L. Lung, Y. Zhang, S. Liang, Y. Shi, R. Huang, Z. Guo, & K. Lai (Eds.), China Semiconductor Technology International Conference 2018, CSTIC 2018 (pp. 1-3). (China Semiconductor Technology International Conference 2018, CSTIC 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CSTIC.2018.8369315