Abstract Highly transparent and c-axis oriented zinc oxide (ZnO)/indium gallium zinc oxide (IGZO) thin films have been fabricated by R.F. sputtering. The effect of annealing on physical properties of the films was investigated and compared with a-IGZO thin films. The films are wurtzite-type hexagonal structure similar to ZnO with [0 0 0 2] preferred direction and exhibit less density of defects. The TFTs fabricated with ZnO/IGZO films after annealing at 450 °C reveal smaller sub-threshold swing (SS∼0.52 V/dec) and threshold voltage (V th ∼1.3 V) than the TFTs (SS∼0.82 V/dec, V th ∼13.3 V) of a-IGZO thin film annealed at the same temperature.
- Thin films