Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate

Hien Do*, Van Truong Dai, Jr Sheng Tian, Tzu Chun Yen, Li Chang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

We investigate the effect of chemical composition and residual stress on the mechanical properties of high-quality epitaxial TiN. xO. y films deposited on MgO(001) substrates by using nanoindentation. The lattice parameters and residual strain/stress of TiN. xO. y films decrease as oxygen concentration increases. Hardness and Young's modulus determined by nanoindentation are about 17-26. GPa and 355-430. GPa, respectively, which vary with chemical composition and residual stress.

Original languageEnglish
Pages (from-to)1-6
Number of pages6
JournalSurface and Coatings Technology
Volume251
DOIs
StatePublished - 25 Jul 2014

Keywords

  • Epitaxial titanium oxynitride
  • Mechanical properties
  • Nanoindentation

Fingerprint Dive into the research topics of 'Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate'. Together they form a unique fingerprint.

Cite this