We investigate the effect of chemical composition and residual stress on the mechanical properties of high-quality epitaxial TiN. xO. y films deposited on MgO(001) substrates by using nanoindentation. The lattice parameters and residual strain/stress of TiN. xO. y films decrease as oxygen concentration increases. Hardness and Young's modulus determined by nanoindentation are about 17-26. GPa and 355-430. GPa, respectively, which vary with chemical composition and residual stress.
- Epitaxial titanium oxynitride
- Mechanical properties