STAGGERED SOURCE/DRAIN AND THIN-CHANNEL TFT STRUCTURE AND FABRICATION METHOD THEREOF

Kow-Ming Chang (Inventor)

Research output: Patent

Original language	English
Patent number	US7,678,623 B2
State	Published - 16 Mar 2010

Cite this

Chang, K-M. (2010). STAGGERED SOURCE/DRAIN AND THIN-CHANNEL TFT STRUCTURE AND FABRICATION METHOD THEREOF. (Patent No. US7,678,623 B2).