Stacked pulse-electroplated CoNiMnP-AAO nanocomposite permanent magnets for MEMS

P. R. Wu, T. Y. Chao, Yu-Ting Cheng

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

The paper presents a CMOS compatible pulse-electroplating technique combined with a low temperature bonding process for the synthesis of CoNiMnP-AAO (anodic alumina oxide) nanocomposite films and the fabrication of stacked composite permanent magnets (PMs). The magnetic nanocomposite film exhibits the best characteristics of the coercivity of 2472 Oe, remanence of 4000 G, and (BH)max of 16.13 kJ m-3, in the existing CoNiMnP systems. Meanwhile, a surface magnetic flux density of 9.2 mT generated by a 15-layer-stacked composite PM with a volume of 9 mm3 has shown the potential for various magnetic microelectromechanical systems (MEMS) fabrication using the nanocomposite material.

Original languageEnglish
Article number125026
JournalJournal of Micromechanics and Microengineering
Volume25
Issue number12
DOIs
StatePublished - 13 Nov 2015

Keywords

  • CoNiMnP-AAO
  • low temperature bonding
  • nanocomposite permanent magnet
  • stacked

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