Stability of InGaZnO thin-film transistors with Durimide passivation

Bo Shiuan Shie, Chih Bin Chang, Hao Chun Chang, Horng-Chih Lin, Tiao Yuan Huang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, we investigate the effectiveness of three organic and inorganic materials as the passivation layers in improving the stability of the a-IGZO devices. Two types of organic materials, FH6400 and Durimide 115A, and inorganic PECVD-SiO X were explored in this work. Because of the effective protection from the diffusion of the gas molecules, especially the oxygen molecules, to the active layer, a-IGZO TFTs with the capping of organic passivation layer show good stability under positive bias stress and also show better stability under light illumination with negative bias stress due to low hydrogen content.

Original languageEnglish
Title of host publicationProceedings of the 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages370-373
Number of pages4
ISBN (Electronic)9781479999286, 9781479999286
DOIs
StatePublished - 25 Aug 2015
Event22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015 - Hsinchu, Taiwan
Duration: 29 Jun 20152 Jul 2015

Publication series

NameProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
Volume2015-August

Conference

Conference22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015
CountryTaiwan
CityHsinchu
Period29/06/152/07/15

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