SPIRIT - A bipolar/BiCMOS isolation technology for high-performance VLSI

J. N. Burghartz, A. O. Cifuentes, J. Warnock, R. C. McIntosh, C. L. Stanis, J. D. Cressler, J. Y.C. Sun, J. H. Comfort, K. A. Jenkins

Research output: Contribution to journalConference article

Original languageEnglish
Article number760289
Pages (from-to)143-144
Number of pages2
JournalDigest of Technical Papers - Symposium on VLSI Technology
DOIs
StatePublished - 1993
Event1993 13th Symposium on VLSI Technology, VLSIT 1993 - Kyoto, Japan
Duration: 17 May 199319 May 1993

Cite this

Burghartz, J. N., Cifuentes, A. O., Warnock, J., McIntosh, R. C., Stanis, C. L., Cressler, J. D., Sun, J. Y. C., Comfort, J. H., & Jenkins, K. A. (1993). SPIRIT - A bipolar/BiCMOS isolation technology for high-performance VLSI. Digest of Technical Papers - Symposium on VLSI Technology, 143-144. [760289]. https://doi.org/10.1109/VLSIT.1993.760289