Spiral scanning method for atomic force microscopy

Shao-Kang Hung*

*Corresponding author for this work

Research output: Contribution to journalArticle

19 Scopus citations


A spiral scanning method is proposed for atomic force microscopy with thoroughgoing analysis and implementation. Comparing with the traditional line-by-line scanning method, the spiral scanning method demonstrates higher imaging speed, minor image distortion, and lower acceleration, which can damage the piezoelectric scanner. Employing the spiral scanning method to replace the lineby-line scanning method, the experiment shows that the time to complete an imaging cycle can be reduced from 800 s to 314 s without sacrificing the image resolution.

Original languageEnglish
Pages (from-to)4511-4516
Number of pages6
JournalJournal of Nanoscience and Nanotechnology
Issue number7
StatePublished - 1 Jul 2010


  • Atomic Force Microscopy
  • Spiral Scanning Method
  • Trajectory Planning

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