Spherical aberration corrected TEM/STEM analysis of La2O3 thin film deposited on Si (001) substrate

S. Inamoto*, J. Yamasaki, E. Okunishi, K. Kakushima, H. Iwai, N. Tanaka

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1010-1011
Number of pages2
JournalMicroscopy and Microanalysis
Issue numberSUPPL. 2
StatePublished - Jul 2009

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