SONOS memories with embedded silicon nanocrystals in nitride by in-situ deposition method

Yi Hong Wu*, Tsung Yu Chiang, Sheng Hsien Liu, Wen Luh Yang, Tien-Sheng Chao, Fun Tat Chin

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science