Simultaneous two-dimensional nanometric-scale position monitoring by probing a two-dimensional photonic crystal plate

Kuei Chu Hsu*, Chii Chang Chen, Chia Hua Chan, Pei Fang Chung, Yin-Chieh Lai

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Simultaneous two-dimensional nanometric-scale position monitoring can be achieved in a simple interferometric setup by real-time probing a hexagonal photonic crystal glass substrate. The minimum detectable translational movement is determined by the period of photonic crystal array, and can be as high as 8 nm in the present work.

Original languageEnglish
Title of host publicationPhotonic and Phononic Crystal Materials and Devices X
DOIs
StatePublished - 7 May 2010
EventPhotonic and Phononic Crystal Materials and Devices X - San Francisco, CA, United States
Duration: 26 Jan 201028 Jan 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7609
ISSN (Print)0277-786X

Conference

ConferencePhotonic and Phononic Crystal Materials and Devices X
CountryUnited States
CitySan Francisco, CA
Period26/01/1028/01/10

Keywords

  • Acronyms
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  • References
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