Simultaneous detection of translational and angular displacements of micromachined elements

E. T. Hwu; Shao-Kang Hung; C. W. Yang; I. S. Hwang; K. Y. Huang

doi:10.1063/1.2817750

Simultaneous detection of translational and angular displacements of micromachined elements

E. T. Hwu^*, Shao-Kang Hung, C. W. Yang, I. S. Hwang, K. Y. Huang

^*Corresponding author for this work

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

Abstract

An astigmatic detection system is constructed with a modified digital-versatile-disk optical head. This system, with a detecting spot of ∼1 μm, can simultaneously measure the vertical displacements and two-dimensional angular tilts of micromachined elements. It can detect thermal vibrations of microfabricated cantilevers with noise levels of 1.3 pm Hz-12 for the linear displacement and of 3.2 nrad Hz-12 for angular displacements over a frequency range from 1 to 800 kHz. The detecting frequency can even reach beyond 100 MHz if high-speed electronic devices are adopted. Further optimization of the system will broaden its applications in diverse technological fields.

Original language	English
Article number	221908
Journal	Applied Physics Letters
Volume	91
Issue number	22
DOIs	https://doi.org/10.1063/1.2817750
State	Published - 6 Dec 2007

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AU - Huang, K. Y.

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