Simultaneous detection of translational and angular displacements of micromachined elements

E. T. Hwu*, Shao-Kang Hung, C. W. Yang, I. S. Hwang, K. Y. Huang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

42 Scopus citations

Abstract

An astigmatic detection system is constructed with a modified digital-versatile-disk optical head. This system, with a detecting spot of ∼1 μm, can simultaneously measure the vertical displacements and two-dimensional angular tilts of micromachined elements. It can detect thermal vibrations of microfabricated cantilevers with noise levels of 1.3 pm Hz-12 for the linear displacement and of 3.2 nrad Hz-12 for angular displacements over a frequency range from 1 to 800 kHz. The detecting frequency can even reach beyond 100 MHz if high-speed electronic devices are adopted. Further optimization of the system will broaden its applications in diverse technological fields.

Original languageEnglish
Article number221908
JournalApplied Physics Letters
Volume91
Issue number22
DOIs
StatePublished - 6 Dec 2007

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