Silicon rice-straw array emitters and their superior electron field emission

Hung Chi Wu, Hung Yin Tsai, Hsin-Tien Chiu, Chi Young Lee*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

Free standing and vertically aligned silicon rice-straw- like array emitters were fabricated by modified electroless metal deposition (EMD), using HF-H2O2 as an etching solution to reduce the emitter density and to make the emitter end of the formed silicon rice-straw arrays shaper than those formed by conventional EMD. These silicon rice-straw array emitters can be turned on at E0 = 4.7 V/μm, yielding an EFE (electron field emission) current density of Je = 139 μA/cm 2 in an applied field of 12.8 V/μm. According to a simple simulation, the excellent EFE performance of the silicon rice-straw array emitters originates in not only the favorable distribution of emitter arrays, but also the shape of the emitter apexes. The modified-EMD method is easily scaled up without expensive equipment, so silicon rice-straw array emitters are a promising alternative to silicon-based field emitters.

Original languageEnglish
Pages (from-to)3285-3288
Number of pages4
JournalACS Applied Materials and Interfaces
Volume2
Issue number11
DOIs
StatePublished - 24 Nov 2010

Keywords

  • electroless metal deposition (EMD)
  • electron field emission (EFE)
  • emitter
  • one-dimensional
  • silicon
  • simulation

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