Silane removal at ambient temperature by using alumina-supported metal oxide adsorbents

Jung Nan Hsu, Chuen-Tinn Tsai*, Cindy Chiang, Shou Nan Li

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

Copper, zinc, and cerium oxide adsorbents supported on alumina were used to remove silane gas (SiH 4). The adsorbents were prepared using a coprecipitation method and characterized by the inductively coupled plasma mass spectrometry, X-ray powder diffractometer, and Brunauer-Emmett-Teller method (BET). The si-lane removal efficiency and adsorption capacity of the adsorbents were investigated in this study. Test results showed that the adsorbents containing active species had a removal efficiency >99.9% for SiH4 before breakthrough. Adsorbents containing mixed oxides (CuO-CeO2/ Al2O3 and CuO-ZnO/Al2O3), which showed well-dispersed active species and high BET surface areas, had a greater adsorption capacity than the adsorbents containing single metal oxide. However, when the CuO-ZnO/ Al2O3 adsorbents contain >40 wt% of active metal oxides, the increase of active species lowered the BET surface area leading to a decrease of the adsorption capacity. Additionally, when the content of the active metal oxides was between 20% and 40%, the CuO-ZnO/Al2O3 adsorbents demonstrated higher adsorption capacity.

Original languageEnglish
Pages (from-to)204-210
Number of pages7
JournalJournal of the Air and Waste Management Association
Volume57
Issue number2
DOIs
StatePublished - 1 Jan 2007

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