Shape effect on the reflectance of sub-wavelength structures on silicon nitride for solar cell application

Kartik Chandra Sahoo, Yiming Li, Edward Y. Chang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We stdy the spectral reflectivity of conical-, cylindrical-and parabolic-shaped silicon nitride (Si3N4) sub-wavelength structures (SWS). A multilayer rigorous coupled-wave approach is adopted to estimate the reflection properties of Si3N4 SWS. Optimal shapes of SWS in terms of effective reflectance are analyzed over a range of wavelength. The results of our study show that a 3.15% effective reflectivity could be achieved for the optimized conical-shaped SWS with the height of 160 nm and the non-etched Si3N4 layer thickness of 70 nm among different shape structure.

Original languageEnglish
Title of host publicationNanotechnology 2010
Subtitle of host publicationBio Sensors, Instruments, Medical, Environment and Energy - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Pages737-740
Number of pages4
StatePublished - 9 Nov 2010
EventNanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 - Anaheim, CA, United States
Duration: 21 Jun 201024 Jun 2010

Publication series

NameNanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Volume3

Conference

ConferenceNanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
CountryUnited States
CityAnaheim, CA
Period21/06/1024/06/10

Keywords

  • Antireflection coating
  • Multilayer
  • Rigorous coupled-wave approach
  • Shape effect
  • Silicon nitride
  • Sub-wavelength structure

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  • Cite this

    Sahoo, K. C., Li, Y., & Chang, E. Y. (2010). Shape effect on the reflectance of sub-wavelength structures on silicon nitride for solar cell application. In Nanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 (pp. 737-740). (Nanotechnology 2010: Bio Sensors, Instruments, Medical, Environment and Energy - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010; Vol. 3).