Shape effect of silicon nitride subwavelength structure on reflectance for silicon solar cells

Kartika Chandra Sahoo, Yiming Li, Edward Yi Chang

Research output: Contribution to journalArticlepeer-review

29 Scopus citations


In this paper, we, for the first time, examine the spectral reflectivity of hemisphere-, cone-, cylinder-, and parabola-shaped silicon nitride (Si 3N4) subwavelength structures (SWSs). A multilayer rigorous coupled-wave approach is advanced to evaluate the reflection properties of Si3N4 SWSs. We optimize the aforementioned four different shapes of SWSs in terms of effective reflectance over a range of wavelength. The results of our paper show that a lowest effective reflectivity could be achieved for the optimized cone-shaped SWS as compared to hemisphere-, parabola-, and cylinder-shaped structures with the same volume. The best shape SWS is then fabricated together with a silicon (Si) solar cell, and the efficiency of the solar cell is compared with that of a solar cell with single-layer antireflection coating (ARC). An increase of 1.09% in cell efficiency (η) is observed for the Si solar cell with a cone-shaped Si 3N4 SWS (η = 12.86%) as compared with the cell with single-layer Si3N4 ARCs (η = 11.77%).

Original languageEnglish
Article number5535073
Pages (from-to)2427-2433
Number of pages7
JournalIEEE Transactions on Electron Devices
Issue number10
StatePublished - 1 Oct 2010


  • Antireflection coating (ARC)
  • efficiency
  • morphological effect
  • multilayer
  • reflectance
  • rigorous coupled-wave approach
  • shape effect
  • silicon nitride
  • subwavelength structure (SWS)

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