Sensitivity enhancement in SiGe-on-insulator nanowire biosensor fabricated by top surface passivation

Chiung Hui Lai*, Kow-Ming Chang, Chu Feng Chen, Cheng Ting Hsieh, Chin Ning Wu, Yu Bin Wang, Chung Hsien Liu, Kuo Chin Chang

*Corresponding author for this work

Research output: Contribution to journalArticle

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Physics & Astronomy

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Engineering & Materials Science