Self-organized titanium oxide nanodot arrays by electrochemical anodization

Po Lin Chen*, Cheng Tzu Kuo, Tzeng Guang Tsai, Bo Wei Wu, Chiung Chih Hsu, Fu-Ming Pan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

64 Scopus citations


The electrochemical anodization of a TiN layer was used to prepare ordered nanodot arrays of titanium oxides. Transmission electron microscopy and scanning electron spectroscopy were used to analyze the microstructure of the nanodot arrays. The as-prepared nanodots were basically amorphous and composed of nonstoichiometric TiO x .

Original languageEnglish
Pages (from-to)2796-2798
Number of pages3
JournalApplied Physics Letters
Issue number17
StatePublished - 28 Apr 2003

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