Self-organized Pairs of Ge Double Quantum Dots with Tunable Sizes and Spacings Enable Room-Temperature Operation of Qubit and Single-Electron Devices

Kang Ping Peng, Ching Lun Chen, Ying Tsan Tang, David Kuo, Thomas George, Horng-Chih Lin, Pei-Wen Li*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We report the first-of-its-kind, paired Ge double quantum dots (DQDs) using spacer technology in combination with selective oxidation of Si0 85Ge0 15 in a self-organization approach. Process-controlled tunability of the spherical Ge QD diameters (5-20nm) and inter-QD spacings as close as 12nm were achieved by thermal oxidation of poly-SiGe spacer islands at each sidewall corner of Si3N4/poly-Si ridges. Based on the capability of producing highly-symmetrical Ge DQDs in terms of QD sizes and the coupling barriers of thermal SiO2/densified Si3N4 between the QDs and proximal electrodes, we demonstrated room-temperature operation of Ge qubit devices, within which one QD encodes charges and the other QD-single-electron transistor (SET) senses and read-out the qubit. Theoretical analysis on the size-tunable density of states for Ge QDs and the tunneling paths in DQDs were conducted. Our Ge DQD system enables a practically achievable building block for QD qubit devices on Si platform.

Original languageEnglish
Title of host publication2019 IEEE International Electron Devices Meeting, IEDM 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9781728140315
DOIs
StatePublished - Dec 2019
Event65th Annual IEEE International Electron Devices Meeting, IEDM 2019 - San Francisco, United States
Duration: 7 Dec 201911 Dec 2019

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume2019-December
ISSN (Print)0163-1918

Conference

Conference65th Annual IEEE International Electron Devices Meeting, IEDM 2019
CountryUnited States
CitySan Francisco
Period7/12/1911/12/19

Fingerprint Dive into the research topics of 'Self-organized Pairs of Ge Double Quantum Dots with Tunable Sizes and Spacings Enable Room-Temperature Operation of Qubit and Single-Electron Devices'. Together they form a unique fingerprint.

Cite this