Self-Aligned, Gate Last, FDSOI, Ferroelectric Gate Memory Device with 5.5-nm Hf0.8Zr0.2O2, High Endurance and Breakdown Recovery

Korok Chatterjee*, Sangwan Kim, Golnaz Karbasian, Ava J. Tan, Ajay K. Yadav, Asif I. Khan, Chen-Ming Hu, Sayeef Salahuddin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

46 Scopus citations


We demonstrate a nonvolatile single transistor ferroelectric gate memory device with ultra-thin (5.5 nm) Hf0.8Zr0.2O2 (HZO) fabricated using a self-aligned gate last process. The FETs are fabricated using silicon-on-insulator wafers, and the ferroelectric is deposited with atomic layer deposition. The reported devices have an ON/OFF drain current ratio of up to 106, a read endurance of >10^{10} read cycles, and a program/erase endurance of 107 cycles. Furthermore, healing of the transistor after gate insulator breakdown is demonstrated.

Original languageEnglish
Article number8025570
Pages (from-to)1379-1382
Number of pages4
JournalIEEE Electron Device Letters
Issue number10
StatePublished - 1 Oct 2017


  • Ferroelectric
  • gate last
  • hafnium zirconium oxide
  • memory
  • silicon-on-insulator

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